Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/19/2006
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Application #:
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10959508
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Filing Dt:
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10/07/2004
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Publication #:
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Pub Dt:
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05/26/2005
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Inventors:
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Osamu Nagano, Atsushi Ando
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Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM, PATTERN DRAWING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO 105-8001, JAPAN |
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| ERNEST F. CHAPMAN |
| FINNEGAN, HENDERSON, FARABOW, GARRETT |
| & DUNNER, L.L.P. |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, D.C. 20001-4413 |
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