Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10719593
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Filing Dt:
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11/21/2003
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Publication #:
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Pub Dt:
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05/26/2005
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Inventor:
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Peng-Cheng Shi
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Title:
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Method and apparatus for detecting electrostatic charges during semiconductor fabrication process
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 4, CREATION RD., III |
SCIENCE-BASED INDUSTRIAL PARK |
HSINCHU, TAIWAN |
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LAW OFFICE OF LIAUH AND ASSOCIATES |
W. WAYNE LIAUH |
4224 WAIALAE AVE., SUITE 5-388 |
HONOLULU, HI 96816 |
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