Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/07/2006
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Application #:
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10730863
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Filing Dt:
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12/08/2003
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Publication #:
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Pub Dt:
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06/09/2005
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Inventors:
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Lawrence M. Ficarra, Alan P. Sheng, Beniamin B. Riordon
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Title:
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SYSTEM AND METHOD FOR MULTI-WAFER SCANNING IN ION IMPLANTERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| SCOTT R. FABER |
| 35 DORY ROAD |
| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| GLOUCESTER, MA 01930 |
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