Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10735881
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Filing Dt:
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12/16/2003
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Publication #:
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Pub Dt:
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06/16/2005
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Inventor:
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Andreas Fischer
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Title:
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Segmented radio frequency electrode apparatus and method for uniformity control
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BURNS, DOANE ET AL. |
| PETER K. SKIFF |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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