Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11064739
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Filing Dt:
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02/23/2005
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Publication #:
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Pub Dt:
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06/30/2005
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Inventors:
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Ilya Perlov, Eugene Gantvarg, Sen-Hou Ko
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Title:
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Method of controlling carrier head with multiple chambers
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| FISH & RICHARDSON P.C. |
| JENNIFER A. ZANOCCO |
| 500 ARGUELLO STREET, SUITE 500 |
| REDWOOD CITY, CA 94063 |
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