Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10666331
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Filing Dt:
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09/17/2003
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Publication #:
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Pub Dt:
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07/28/2005
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Inventors:
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Hong Shih, Anthony L. Chen, Sok Kiow Tan, Stephen Hwang, John Daugherty, Bruno Morel
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Title:
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Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing system
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| IPSG, P.C. |
| P.O. BOX 700640 |
| SAN JOSE, CA 95170-0640 |
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