Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/12/2008
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Application #:
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11053328
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Filing Dt:
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02/09/2005
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Publication #:
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Pub Dt:
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08/04/2005
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Inventors:
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Herman Vogel, Klaus Simon, Antonius Theodorus Anna Maria Derksen
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Title:
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IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING MICROCHANNEL NOZZLES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| C/O GEORGE S. BARDMESSER |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, D.C. 20005-3934 |
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