Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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10965819
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Filing Dt:
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10/18/2004
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Publication #:
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Pub Dt:
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08/04/2005
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Inventors:
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Masaki Kurokawa, Norifumi Kimura, Takehiko Fujita, Yoshikazu Furusawa, Katsuhiko Komori et al
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Title:
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FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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