Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/27/2007
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Application #:
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11060501
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Filing Dt:
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02/18/2005
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Publication #:
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Pub Dt:
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08/25/2005
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Inventor:
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Seiji Samukawa
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Title:
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REAL-TIME MONITORING APPARATUS FOR PLASMA PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17-2, SHIN YOKOHAMA 3-CHOME, KOUHOKU-KU, |
| YOKOHAMA-SHI |
| KANAGAWA 222-0033, JAPAN |
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| STAAS & HALSEY LLP |
| J. RANDALL BECKERS |
| 1201 NEW YORK AVENUE, N.W., SUITE 700 |
| WASHINGTON, D.C. 20005 |
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