Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11057164
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Filing Dt:
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02/15/2005
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Publication #:
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Pub Dt:
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09/01/2005
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Inventors:
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Katsunori Suzuki, Takayuki Shimizu, Hiroyoshi Aoki, Koji Mori, Satoru Hiraoka
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Title:
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Plasma processing apparatus and method of plasma processing
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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MAKUHARI TECHNO GARDEN B5 |
1-3, NAKASE |
MIHAMA-KU, CHIBA 261-8501, JAPAN |
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JAMES A. OLIFF |
OLIFF & BERRIDGE, PLC |
P.O. BOX 19928 |
ALEXANDRIA, VA 22320 |
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