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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11057164
Filing Dt:
02/15/2005
Publication #:
Pub Dt:
09/01/2005
Inventors:
Katsunori Suzuki, Takayuki Shimizu, Hiroyoshi Aoki, Koji Mori, Satoru Hiraoka
Title:
Plasma processing apparatus and method of plasma processing
Assignment: 1
Reel/Frame:
016281/0006Recorded: 02/15/2005Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/08/2005
Exec Dt:
02/08/2005
Exec Dt:
02/09/2005
Exec Dt:
02/09/2005
Exec Dt:
02/08/2005
Assignee:
MAKUHARI TECHNO GARDEN B5
1-3, NAKASE
MIHAMA-KU, CHIBA 261-8501, JAPAN
Correspondent:
JAMES A. OLIFF
OLIFF & BERRIDGE, PLC
P.O. BOX 19928
ALEXANDRIA, VA 22320

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