Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10805966
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Filing Dt:
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03/22/2004
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Publication #:
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Pub Dt:
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09/22/2005
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Inventors:
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Vikram Singh, Timothy Miller, Paul J. Murphy, Robert H. Bettencourt, Harold M. Persing et al
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Title:
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Plasma immersion ion implantation apparatus and method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUOCESTER, MASSACHUSETTS 01930-2297 |
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| VARIAN SEMICONDUCTOR EQUIPMENT |
| ASSOCIATES, INC. |
| MARK SUPERKO |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930-2297 |
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