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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/07/2008
Application #:
11019109
Filing Dt:
12/22/2004
Publication #:
Pub Dt:
09/22/2005
Inventors:
Atsushi Takane, Tatsuya Maeda, Takashi Iizumi
Title:
METHOD FOR MEASURING LINE AND SPACE PATTERN USING SCANNING ELECTRON MICROSCOPE
Assignment: 1
Reel/Frame:
016605/0901Recorded: 05/27/2005Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/16/2004
Exec Dt:
12/17/2004
Exec Dt:
12/18/2004
Assignee:
24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU,
TOKYO, JAPAN
Correspondent:
NCDERMOTT WILL & EMERY LLP
600 13TH STREET, N.W.
WASHINGTON, D. C. 20005-3096

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