Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/05/2008
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Application #:
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10960600
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Filing Dt:
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10/07/2004
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Publication #:
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Pub Dt:
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09/22/2005
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Inventors:
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Hiroshi Shinriki, Baiei Kawano, Akira Shimizu
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Title:
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APPARATUS AND METHOD FOR FORMING THIN FILM USING UPSTREAM AND DOWNSTREAM EXHAUST MECHANISMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6-CHOME, NAGAYAMA, TAMA-SHI |
| TOKYO 206-0025, JAPAN |
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| KATSUHIRO ARAI |
| KNOBBE MARTENS OLSON & BEAR LLP |
| 2040 MAIN STREET |
| FOURTEENTH FLOOR |
| IRVINE, CA 92614 |
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