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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
7253109
Issue Dt:
08/07/2007
Application #:
11069348
Filing Dt:
02/28/2005
Publication #:
20050208767
Pub Dt:
09/22/2005
Inventors:
Peijun Ding, Zheng Xu, Hong Zhang, Xianmin Tang, Praburam Gopalraja, Suraj Rengarajan et al
Title:
METHOD OF DEPOSITING A TANTALUM NITRIDE/TANTALUM DIFFUSION BARRIER LAYER SYSTEM
Assignment: 1
Reel/Frame:
016320/0574Recorded: 06/10/2005Pages: 22
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
DING, PEIJUN
Exec Dt:
03/25/2005
XU, ZHENG
Exec Dt:
03/24/2005
ZHANG, HONG
Exec Dt:
04/20/2005
TANG, XIANMIN
Exec Dt:
03/17/2005
GOPALRAJA, PRABURAM
Exec Dt:
06/06/2005
RENGARAJAN, SURAJ
Exec Dt:
03/18/2005
FORSTER, JOHN C.
Exec Dt:
03/18/2005
FU, JIANMING
Exec Dt:
03/21/2005
CHIANG, TONY
Exec Dt:
05/08/2005
YAO, GONGDAO
Exec Dt:
05/24/2005
CHEN, FUSEN E.
Exec Dt:
03/26/2005
CHIN, BARRY L.
Exec Dt:
03/19/2005
KOHARA, GENE Y.
Exec Dt:
05/10/2005
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
PATENT COUNSEL
APPLIED MATERIALS, INC.
P.O. BOX 450-A
SANTA CLARA, CA 95052

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