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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11063645
Filing Dt:
02/22/2005
Publication #:
20050230350
Pub Dt:
10/20/2005
Inventors:
Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston et al
Title:
In-situ dry clean chamber for front end of line fabrication
Assignment: 1
Reel/Frame:
016648/0046Recorded: 06/06/2005Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KAO, CHIEN-TEH
Exec Dt:
04/25/2005
CHOU, JING-PEI (CONNIE)
Exec Dt:
05/02/2005
LAI, CHIUKIN (STEVEN)
Exec Dt:
04/26/2005
UMOTOY, SAL
Exec Dt:
04/21/2005
HUSTON, JOEL M.
Exec Dt:
04/20/2005
TRINH, SON
Exec Dt:
05/02/2005
CHANG, MEI
Exec Dt:
04/26/2005
YUAN, XIAOXIONG (JOHN)
Exec Dt:
04/19/2005
CHANG, YU
Exec Dt:
04/19/2005
LU, XINLIANG
Exec Dt:
04/19/2005
WANG, WEI W.
Exec Dt:
04/19/2005
PHAN, SEE-ENG
Exec Dt:
04/19/2005
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450-A
PATENT COUNSEL
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS INC.
PATENT COUNSEL
P.O. BOX 450-A
SANTA CLARA, CA 95052

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