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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/27/2007
Application #:
10833206
Filing Dt:
04/26/2004
Publication #:
Pub Dt:
10/27/2005
Inventors:
Yu-Lin Yen, Ching-Yu Chang
Title:
METHOD OF REDUCING FILM STRESS ON OVERLAY MARK
Assignment: 1
Reel/Frame:
015278/0170Recorded: 04/26/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/23/2004
Exec Dt:
04/23/2004
Assignee:
16 LI-HSIN ROAD, SCIENCE-BASED INDUSTRIAL PARK
HSINCHU, TAIWAN, KOREA, REPUBLIC OF
Correspondent:
STOUT, UXA, BUYAN ET.AL.
KENTON R. MULLINS
4 VENTURE SUITE 300
IRVINE, CA 92618

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