Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/07/2010
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Application #:
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11171243
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Filing Dt:
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07/01/2005
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Publication #:
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Pub Dt:
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11/03/2005
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Inventors:
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Hideaki Hara, Hiroaki Takaiwa, Dai Arai
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Title:
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LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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| MARIO A. COSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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