Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/20/2007
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Application #:
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10835788
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Filing Dt:
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04/30/2004
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Publication #:
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Pub Dt:
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11/03/2005
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Inventors:
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Zhen-Cheng Wu, Bi-Troug Chen, Weng Chang, Syun-Ming Jang, Su-Horng Lin
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Title:
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RELIABILITY IMPROVEMENT OF SIOC ETCH WITH TRIMETHYLSILANE GAS PASSIVATION IN CU DAMASCENE INTERCONNECTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77, TAIWAN R.O.C. |
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| GEORGE O. SAILE |
| 28 DAVIS AVENUE |
| POUGHKEEPSIE, NY 12603 |
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