Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11119388
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Filing Dt:
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04/29/2005
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Publication #:
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Pub Dt:
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11/17/2005
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Inventors:
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Son T. Nguyen, Kedarnath Sangam, Miriam Schwartz, Kenric Choi, Sanjay Bhat et al
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Title:
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Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| P.O. BOX 450-A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CA 95052 |
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