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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
10490217
Filing Dt:
04/01/2004
Publication #:
20050252451
Pub Dt:
11/17/2005
Inventors:
Tatsuro Beppu, Katsuo Sakai, Seiji Okura, Masaji Sakamura, Kaoru Abe, Hitoshi Murata et al
Title:
Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas
Assignment: 1
Reel/Frame:
015308/0456Recorded: 05/07/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BEPPU, TATSURO
Exec Dt:
01/26/2004
SAKAI, KATSUO
Exec Dt:
01/26/2004
OKURA, SEIJI
Exec Dt:
01/26/2004
SAKAMURA, MASAJI
Exec Dt:
01/26/2004
ABE, KAORU
Exec Dt:
01/26/2004
MURATA, HITOSHI
Exec Dt:
01/26/2004
WANI, ETSUO
Exec Dt:
01/26/2004
KAMEDA, KENJI
Exec Dt:
01/26/2004
MITSUI, YUKI
Exec Dt:
01/26/2004
OHIRA, YUTAKA
Exec Dt:
01/26/2004
YONEMURA, TAISUKE
Exec Dt:
01/26/2004
SEKIYA, AKIRA
Exec Dt:
01/26/2004
Assignees:
RESEARCH INSTITUTE OF INNOVATIVE TECHNOLOGY FOR THE EARTH
2, KIZUGAWA-DAI 9-CHOME
KIZU-CHO, SOURAKU-GUN
KYOTO 619-0292, JAPAN
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
3-1, KASUMIGASEKI 1-CHOME, CHIYODA-KU
TOKYO 100-8921, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
1940 DUKE STREET
ALEXANDRIA, VA 22314
Assignment: 2
Reel/Frame:
015338/0010Recorded: 11/01/2004Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
RESEARCH INSTITUTE OF INNOVATIVE TECHNOLOGY FOR THE EARTH
Exec Dt:
10/20/2004
Assignees:
ANELVA CORPORATION
8-1, YOTSUYA 5-CHOME
FUCHU-SHI, TOKYO, JAPAN
ULVAC, INC.
2500, HAGISONO
CHIGASAKI-SHI, KANAGAWA, JAPAN
KANTO DENKA KOGYO CO., LTD.
2-1, MARUNOUCHI 1-CHOME
CHIYODA-KU, TOKYO, JAPAN
SANYO ELECTRIC CO., LTD.
5-5, KEIHANHONDORI 2-CHOME
MORIGUCHI-SHI, OSAKA, JAPAN
SONY CORPORATION
7-35, KITASHINAGAWA 6-CHOME
SHINAGAWA-KU, TOKYO, JAPAN
DAIKIN INDUSTRIES, LTD
4-12, NAKAZAKINISHI 2-CHOME
KITA-KU, OSAKA-SHI, OSAKA, JAPAN
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME
MINATO-KU, TOKYO, JAPAN
HITACHI KOKUSAI ELECTRIC INC.
14-20, HIGASHINAKANO 3-CHOME
NAKANO-KU, TOKYO, JAPAN
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA
KADOMA-SHI, OSAKA, JAPAN
MITSUBISHI DENKI KABUSHIKI KAISHA
2-3, MARUNOUCHI 2-CHOME
CHIYODA-KU, TOKYO, JAPAN
RENESAS TECHNOLOGY CORP.
4-1, MARUNOUCHI 2-CHOME
CHIYODA-KU, TOKYO, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
1940 DUKE STREET
ALEXANDRIA, VA 22314

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