Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11133452
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Filing Dt:
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05/20/2005
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Publication #:
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Pub Dt:
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11/24/2005
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Inventors:
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Kenji Shirakawa, Nobuhiro Nishizaki, Kohichi Sekiya, Kazuo Iwami, Masato Toyota
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Title:
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Clamp member, film deposition apparatus, film deposition method, and semiconductor device manufacturing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4-1, MARUNOUCHI 2-CHOME |
CHIYODA-KU, TOKYO 100-6334, JAPAN |
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MCDERMOTT WILL & EMERY LLP |
600 13TH STREET, N.W. |
WASHINGTON, DC 20005-3096 |
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