Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11080521
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Filing Dt:
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03/16/2005
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Publication #:
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Pub Dt:
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11/24/2005
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Inventors:
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Jae-Young Park, Seung-Jin Lee, Young-Min Kim
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Title:
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Method of cleaning an interior of a remote plasma generating tube and appartus and method for processing a substrate using the same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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| EUGENE M. LEE |
| LEE, STERBA & MORSE, P.C. |
| 1101 WILSON BOULEVARD, SUITE 2000 |
| ARLINGTON, VA 22209 |
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Assignment:
2
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ASSIGNMENT OF 50% INTEREST
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| 2500 HAGISONO |
| CHIGASAKI, KANAGAWA, JAPAN 253-8543 |
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| EUGENE M. LEE |
| 3141 FAIRVIEW PARK DRIVE, SUITE 500 |
| FALLS CHURCH, VIRGINIA 22042 |
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