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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/08/2008
Application #:
10852643
Filing Dt:
05/24/2004
Publication #:
Pub Dt:
11/24/2005
Inventors:
Steven R. Walther, Ziwei Fang, Justin Tocco, Carleton F. Ellis III
Title:
METHODS FOR STABLE AND REPEATABLE ION IMPLANTATION
Assignment: 1
Reel/Frame:
015381/0392Recorded: 05/24/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/13/2004
Exec Dt:
05/13/2004
Exec Dt:
05/13/2004
Exec Dt:
05/13/2004
Assignee:
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
VARIAN SEMICONDUCTOR EQUIPMENT
ASSOCIATES, INC.
MARK A. SUPERKO, ESQ.
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930-2297

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