Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10851378
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Filing Dt:
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05/21/2004
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Publication #:
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Pub Dt:
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11/24/2005
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Inventors:
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Wee-chen Richard Gan, Karen Wong, Kuo-Chun Wu
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Title:
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TORQUE-BASED END POINT DETECTION METHODS FOR CHEMICAL MECHANICAL POLISHING TOOL WHICH USES CERIA-BASED CMP SLURRY TO POLISH TO PROTECTIVE PAD LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 19 LI HSIN ROAD |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN CHU CITY, TAIWAN |
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| MACPHERSON, KWOK CHEN & HEID LLP |
| GIDEON GIMLAN |
| 1762 TECHNOLOGY DRIVE, SUITE 226 |
| SAN JOSE, CA 95110 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 19 LI HSIN ROAD, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN CHU CITY, TAIWAN |
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| MACPHERSON, KWOK CHEN & HEID LLP |
| GIDEON GIMLAN |
| 1762 TECHNOLOGY DRIVE, SUITE 226 |
| SAN JOSE, CA 95110 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3F, NO. 19, LI-HSIN ROAD, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN CHU CITY, TAIWAN |
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| MICHAEL SHENKER |
| MACPHERSON, KWOK CHEN & HEID LLP |
| 1762 TECHNOLOGY DRIVE, SUITE 226 |
| SAN JOSE, CA 95110 |
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