Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11085231
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Filing Dt:
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03/22/2005
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Publication #:
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Pub Dt:
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12/01/2005
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Inventors:
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Toshiyuki Ohdaira, Yoshimi Shioya
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Title:
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Ultraviolet ray generator, ultraviolet ray irradiation processing apparatus, and semiconductor manufacturing system
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, KASUMIGASEKI 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8921 |
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| APPEX BUILDING 4F, 717-30, FUTAMATA |
| ICHIKAWA-SHI, CHIBA, JAPAN 272-0001 |
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| GEORGE A. LOUD |
| LORUSSO, LOUD & KELLY |
| 3137 MOUNT VERNON AVENUE |
| ALEXANDRIA, VA 22305 |
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