Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11153223
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Filing Dt:
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06/15/2005
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Publication #:
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Pub Dt:
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12/01/2005
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Inventors:
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Minoru Nakano, Masaaki Ueno, Kazuo Tanaka
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Title:
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Method and apparatus for controlling a semiconductor fabrication temperature
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU |
| TOKYO, JAPAN 164-8511 |
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| JENEY HAN |
| 575 MADISON AVENUE |
| SUITE 1519B |
| NEW YORK, NY 10022 |
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