Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/16/2010
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Application #:
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10518371
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Filing Dt:
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12/28/2004
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Publication #:
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Pub Dt:
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12/08/2005
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Inventors:
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Hiroshi Mashima, Akira Yamada, Keisuke Kawamura, Kenji Tagashira, Yoshiaki Takeuchi
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Title:
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METHOD FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION AND APPARATUS FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16-5, KONAN 2-CHOME, MINATO-KU |
| TOKYO 108-8215, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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