Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10863360
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Filing Dt:
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06/09/2004
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Publication #:
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Pub Dt:
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12/15/2005
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Inventors:
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Hong Shih, Tuochuan Huang, Duane Outka, Jack Kuo, Shenjian Liu, Bruno Morel, Anthony Chen
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Title:
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Methods for wet cleaning quartz surfaces of components for plasma processing chambers
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BURNS DOANE SWECKER & MATHIS L L P |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BUCHANAN INGERSOLL PC |
| (INCLUDING BURNS, DOANE, SWECKER & MATHI |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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