Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10874944
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Filing Dt:
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06/23/2004
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Publication #:
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Pub Dt:
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12/29/2005
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Inventors:
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Vikram Singh, Harold Persing, Timothy Miller, Atul Gupta, Ziwei Fang
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Title:
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Etch and deposition control for plasma implantation
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| WOLF, GREENFIELD & SACKS, P.C. |
| JAMIE H. ROSE |
| FEDERAL RESERVE PLAZA |
| 600 ATLANTIC AVENUE |
| BOSTON, MA 02210 |
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