Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/22/2011
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Application #:
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11217523
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Filing Dt:
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08/31/2005
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Publication #:
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Pub Dt:
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01/05/2006
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Inventors:
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John Boyd, Andras Kuthi, William Thie, Michael G.R. Smith, Thomas W. Anderson
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Title:
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MEGASONIC CLEANING EFFICIENCY USING AUTO-TUNING OF A RF GENERATOR AT CONSTANT MAXIMUM EFFICIENCY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA & GENCARELLA, LLP |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
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