Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10882464
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Filing Dt:
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06/30/2004
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Publication #:
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Pub Dt:
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01/05/2006
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Inventors:
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Miguel A. Saldana, Leonard J. Sharpless, John E. Daugherty
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Title:
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Methods and apparatus for optimal temperature control in a plasma processing system
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| IPSG, P.C. |
| ALEXANDER SOUSA |
| P.O. BOX 700640 |
| SAN JOSE, CALIFORNIA 95170-0640 |
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