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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10885898
Filing Dt:
07/08/2004
Publication #:
Pub Dt:
01/12/2006
Inventors:
Frank Sobel, Lutz Aschke, Guenter Hess, Hans Becker, Markus Renno, Frank Schmidt et al
Title:
Method for manufacturing of a mask blank for EUV photolithography and mask blank
Assignment: 1
Reel/Frame:
015884/0202Recorded: 10/07/2004Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/20/2004
Exec Dt:
08/28/2004
Exec Dt:
09/07/2004
Exec Dt:
08/20/2004
Exec Dt:
08/20/2004
Exec Dt:
08/23/2004
Exec Dt:
09/07/2004
Assignee:
HATTENBERGSTRASSE 10
MAINZ, GERMAN DEMOCRATIC REPUBLIC 551222
Correspondent:
MILLEN, WHITE, ZELANO ET.AL.
ANTHONY J. ZELANO
2200 CLARENDON BLVD., SUITE 1400
ARLINGTON, VA 22201

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