Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11180629
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Filing Dt:
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07/14/2005
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Publication #:
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Pub Dt:
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01/19/2006
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Inventors:
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Noriyuki Tanaka, Ken Iizumi, Yoshinori Nakayama, Hiroya Ohta, Makoto Sakakibara et al
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Title:
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Measurement method of electron beam current, electron beam lithography method and system
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHISHIMBASHI 1-CHOME MINATO-KU |
| TOKYO, JAPAN |
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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| MARK J. THRONSON |
| DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP |
| 2101 L STREET NW |
| WASHINGTON, D.C. 20037-1526 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF THE FIRST ASSIGNEE LISTED IN BOX #2.
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| 24-14, NISHISHINBASHI 1-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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| MARK J. THRONSON |
| DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP |
| 2101 L STREET NW |
| WASHINGTON, DC 200037-1526 |
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