Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/21/2009
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Application #:
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11237651
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Filing Dt:
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09/29/2005
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Publication #:
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Pub Dt:
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02/02/2006
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Inventors:
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Andrew J. Hazelton, Hidemi Kawai, Douglas C. Watson, W. Thomas Novak
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Title:
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CLEANUP METHOD FOR OPTICS IN IMMERSION LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI, 3-CHOME |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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| MARIO A. COSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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