Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11177697
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Filing Dt:
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07/08/2005
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Publication #:
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Pub Dt:
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02/09/2006
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Inventors:
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Katsuhiko Miya, Koji Ando
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Title:
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Substrate processing apparatus which performs predetermined processing by supplying a processing liquid to a substrate which is held at a substrate processing position
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU |
KYOTO 602-8585, JAPAN |
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OSTROLENK, FABER, GERB & SOFFEN, LLP |
1180 AVENUE OF THE AMERICAS |
NEW YORK, NEW YORK 10036-8403 |
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