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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
10927095
Filing Dt:
08/27/2004
Publication #:
20060042757
Pub Dt:
03/02/2006
Inventors:
Seiichiro Kanno, Manabu Edamura, Toru Aramaki, Ryujiro Udo, Masatsugu Arai et al
Title:
Wafer processing apparatus capable of controlling wafer temperature
Assignment: 1
Reel/Frame:
016080/0480Recorded: 12/13/2004Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SEIICHIRO, KANNO
Exec Dt:
11/11/2004
MANABU, EDAMURA
Exec Dt:
11/11/2004
UDO, RYUJIRO
Exec Dt:
11/19/2004
ARAI, MASATSUGU
Exec Dt:
11/25/2004
TANAKA, JUNICHI
Exec Dt:
11/19/2004
KANAI, SABURO
Exec Dt:
11/19/2004
NISHIO, RYOJI
Exec Dt:
11/19/2004
TSUBONE, TSUNEHIKO
Exec Dt:
11/19/2004
ARAMAKI, TORU
Exec Dt:
11/29/2004
Assignees:
HITACHI, LTD.
6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU
TOKYO, JAPAN
HITACHI HIGH TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU
TOKYO, JAPAN
Correspondent:
ANTONELLI, TERRY ET AL
1300 NORTH 17TH STREET - SUITE 1800
ARLINGTON, VA 22209
Assignment: 2
Reel/Frame:
016780/0354Recorded: 07/14/2005Pages: 3
Conveyance:
CORRECTED COVER SHEET TO CORRECT 1ST AND 2ND INVENTOR'S NAME, PREVIOUSLY RECORDED AT REEL/FRAME 016080/0480 (ASSIGNMENT OF ASSIGNOR'S INTEREST)
Assignors:
KANNO, SEIICHIRO
Exec Dt:
11/11/2004
EDAMURA MANABU
Exec Dt:
11/11/2004
UDO, RYUJIRO
Exec Dt:
11/25/2004
ARAI, MASATSUGU
Exec Dt:
11/25/2004
TANAKA, JUNICHI
Exec Dt:
11/29/2004
KANAI, SABURO
Exec Dt:
11/19/2004
NISHIO, RYOJI
Exec Dt:
11/19/2004
TSUBONE, TSUNEHIKO
Exec Dt:
11/19/2004
ARAMAKI, TORU
Exec Dt:
11/19/2004
Assignees:
HITACHI LTD.
6-6, MARUNOUCHI 1-CHOME, CHIYODA-KU
TOKYO, JAPAN
HITACHI, HIGH-TECHNOLOGIES CORPORATION
24-14, NISHINBASHI 1-CHOME
MINATO-KU
TOKYO, JAPAN
Correspondent:
ANTONELLI, TERRY, STOUT & KRAUS, LLP
1300 NORTH 17TH STREET - SUITE 1800
ARLINGTON, VA 22209

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