Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10930277
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Filing Dt:
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08/30/2004
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Publication #:
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Pub Dt:
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03/02/2006
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Inventors:
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Michael Feldbaum, Hung-Chin Guthrie, Wipul Pemsiri Jayasekara, Aron Pentek
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Title:
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SYSTEM, METHOD, AND APPARATUS FOR ION BEAM ETCHING PROCESS STABILITY USING A REFERENCE FOR TIME SCALING SUBSEQUENT STEPS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LOCATELLIKADE 1 |
| PARNASSUSTOREN |
| 1070 AZ AMSTERDAM, NETHERLANDS |
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| BRACEWELL & PATTERSON, L.L.P. |
| MICHAEL E. NOE, JR. |
| P.O. BOX 61389 |
| HOUSTON, TX 77208-1389 |
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