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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10458037
Filing Dt:
06/10/2003
Publication #:
Pub Dt:
03/02/2006
Inventors:
Reuel B. Liebert, Harold Persing, James Buff
Title:
Ion implanter having enhanced low energy ion beam transport
Assignment: 1
Reel/Frame:
014179/0013Recorded: 06/10/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/04/2003
Exec Dt:
06/04/2003
Exec Dt:
06/04/2003
Assignee:
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOC.INC
WILLIAM R. MCCLELLAN
35 DORY ROAD
GLOUCESTER, MA 01930-2297

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