Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/20/2007
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Application #:
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11205782
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Filing Dt:
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08/16/2005
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Publication #:
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Pub Dt:
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03/09/2006
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Inventors:
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David T. Wei, Axel Scherer
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Title:
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UTILIZING AN INTEGRATED PLASMON DETECTOR TO MEASURE A METAL DEPOSIT ROUGHNESS ON A SEMICONDUCTOR SURFACE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1200 E. CALIFORNIA BLVD., M/C 201-85 |
PASADENA, CALIFORNIA 91125 |
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ROBERT POPA |
LADAS & PARRY |
5670 WILSHIRE BOULEVARD, #2100 |
LOS ANGELES, CA 90036 |
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