Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11266167
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Filing Dt:
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11/03/2005
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Publication #:
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Pub Dt:
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03/09/2006
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Inventors:
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David T. Or, Jing-Pei Chou, See-Eng Phan, Xinliang Lu, Chien-Teh Kao, Mei Chang
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Title:
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In-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| PATENT COUNSEL |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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