Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/08/2009
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Application #:
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10953791
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Filing Dt:
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09/30/2004
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Publication #:
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Pub Dt:
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03/30/2006
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Inventors:
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Lee Chen, Caiz Hong Tian, Naoki Matsumoto
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Title:
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METHOD AND SYSTEM FOR IMPROVING COUPLING BETWEEN A SURFACE WAVE PLASMA SOURCE AND A PLASMA SPACE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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