Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10951548
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Filing Dt:
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09/27/2004
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Publication #:
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Pub Dt:
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03/30/2006
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Inventors:
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Chia-Cheng Cheng, Timothy J. Guiney, Rao Annapragada, Subhash Deshmukh
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Title:
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Methods and apparatus for monitoring a process in a plasma processing system by measuring impedance
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
P1318 |
FREMONT, CALIFORNIA 94538 |
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IPSG, PC |
PO BOX 700640 |
JOSEPH A. NGUYEN |
SAN JOSE, CA 95170 |
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