Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/06/2009
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Application #:
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11232606
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Filing Dt:
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09/22/2005
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Publication #:
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Pub Dt:
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03/30/2006
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Inventors:
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Michael Totzeck, Gerhart Fuerter, Olaf Dittmann, Karl-Heinz Schuster, David Shafer et al
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Title:
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ARRANGEMENT OF OPTICAL ELEMENTS IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STR. 22 |
| OBERKOCHEN, GERMANY D-73447 |
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| YOUNG & BASILE, P.C. |
| 3001 WEST BIG BEAVER ROAD |
| SUITE 624 |
| TROY, MI 48084-3107 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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