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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
11239966
Filing Dt:
09/30/2005
Publication #:
Pub Dt:
04/06/2006
Inventor:
Eric Antonissen
Title:
Multi-zone atomic layer deposition apparatus and method
Assignment: 1
Reel/Frame:
017056/0128Recorded: 09/30/2005Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
09/29/2005
Assignee:
1712 BREWSTER AVENUE
REDWOOD CITY, CALIFORNIA 94062
Correspondent:
FENWICK & WEST LLP
MICHAEL W. FARN
801 CALIFORNIA STREET
SILICON VALLEY CENTER
MOUNTAIN VIEW, CA 94041

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