Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/30/2009
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Application #:
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11245212
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Filing Dt:
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10/07/2005
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Publication #:
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Pub Dt:
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04/13/2006
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Inventor:
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Yasuhiro Rikihisa
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Title:
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EXHAUST GAS SCRUBBER FOR EPITAXIAL WAFER MANUFACTURING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| 1600 TYSONS BOULEVARD |
| P.O.BOX 10500 |
| MCLEAN, VA 22102 |
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