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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
10960508
Filing Dt:
10/08/2004
Publication #:
Pub Dt:
04/13/2006
Inventors:
Ajoy Zutshi, Rahul Surana, Girish Dixit
Title:
System, method, and medium for an endpoint detection scheme for copper low-dielectric damascene structures for improved dielectric and copper loss
Assignment: 1
Reel/Frame:
015897/0892Recorded: 10/08/2004Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/17/2004
Exec Dt:
08/17/2004
Exec Dt:
09/26/2004
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
SCOTT M. ALTER
PATENT COUNSEL, MS/2061
LEGAL AFFAIRS DEPT., P.O. BOX 450A
SANTA CLARA, CA 95052
Assignment: 2
Reel/Frame:
016768/0445Recorded: 11/11/2005Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/17/2004
Exec Dt:
08/26/2004
Exec Dt:
09/17/2004
Assignee:
P. O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS
P.O. BOX 450A
SANTA CLARA, CA 95052

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