Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/12/2009
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Application #:
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11258894
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Filing Dt:
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10/27/2005
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Publication #:
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Pub Dt:
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05/04/2006
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Inventors:
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Takeshi Kinsho, Masaki Ohashi, Takeru Watanabe, Koji Hasegawa, Seiichiro Tachibana
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Title:
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FLUORINATED MONOMER HAVING CYCLIC STRUCTURE, MANUFACTURING METHOD, POLYMER, PHOTORESIST COMPOSITION AND PATTERNING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| GERALD M. MURPHY, JR. |
| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| 8110 GATEHOUSE ROAD, SUITE 100 EAST |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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