Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/14/2006
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Application #:
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10986076
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Filing Dt:
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11/12/2004
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Publication #:
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Pub Dt:
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05/18/2006
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Inventors:
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Erik Loopstra, Stephen Roux
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Title:
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ACTIVE FACETED MIRROR SYSTEM FOR LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR. VELDHOVEN, NETHERLANDS |
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| STERNE, KESSLER, GOLDSTEIN & FOX PLLC |
| C/O MICHAEL D. SPECHT |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, D.C. 20005-3934 |
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