Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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09/01/2009
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Application #:
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10995714
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Filing Dt:
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11/23/2004
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Publication #:
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Pub Dt:
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05/25/2006
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Inventors:
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Sajan Marokkey, Wai-Kin Li, Todd C. Bailey
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Title:
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STRAY LIGHT FEEDBACK FOR DOSE CONTROL IN SEMICONDUCTOR LITHOGRAPHY SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1730 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95112 |
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| IRA S. MATSIL |
| SLATER & MATSIL, L.L.P. |
| 17950 PRESTON RD. |
| SUITE 1000 |
| DALLAS, TX 75252-5793 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IRA S. MATSIL |
| SLATER & MATSILL L.L.P. |
| 17950 PRESTON RD. |
| SUITE 1000 |
| DALLAS, TX 75252-5793 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STR. 53 |
| MUNICH, GERMANY 81669 |
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| HEATHER ROWLAND |
| 3000 CENTREGREEN WAY |
| CARY, NC 27513 |
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