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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7138641
Issue Dt:
11/21/2006
Application #:
11139490
Filing Dt:
05/31/2005
Publication #:
20060113490
Pub Dt:
06/01/2006
Inventors:
Hiroshi Matsushita, Mitsuaki Kabasawa, Yoshitaka Amano, Yasuhiko Kimura et al
Title:
BEAM DEFLECTING METHOD, BEAM DEFLECTOR FOR SCANNING, ION IMPLANTATION METHOD, AND ION IMPLANTATION SYSTEM
Assignment: 1
Reel/Frame:
016649/0772Recorded: 05/31/2005Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MATSUSHITA, HIROSHI
Exec Dt:
05/27/2005
KABASAWA, MITSUAKI
Exec Dt:
05/27/2005
AMANO, YOSHITAKA
Exec Dt:
05/27/2005
KIMURA, YASUHIKO
Exec Dt:
05/27/2005
TSUKIHARA, MITSUKUNI
Exec Dt:
05/27/2005
MURAKAMI, JUNICHI
Exec Dt:
05/27/2005
Assignee:
SUMITOMO EATON NOVA CORPORATION
10-1, YOUGA 4-CHOME, SETAGAYA-KU
TOKYO, JAPAN
Correspondent:
ARENT FOX PLLC
1050 CONNECTICUT AVENUE, N.W., SUITE 400
WASHINGTON, DC 20036-5339
Assignment: 2
Reel/Frame:
019541/0573Recorded: 07/12/2007Pages: 10
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
SUMITOMO EATON NOVA CORPORATION
Exec Dt:
04/03/2006
Assignee:
SEN CORPORATION, AN SHI AND AXCELIS COMPANY
10-1, YOGA 4-CHOME
SETAGAYA-KU, TOKYO, JAPAN
Correspondent:
ARENT FOX LLP
1050 CONNECTICUT AVENUE, N.W.
SUITE 400
WASHINGTON, DC 20036-5339

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